Graphene Synthesis by Plasma-Enhanced CVD Growth with Ethanol
نویسندگان
چکیده
منابع مشابه
CVD Growth of Mono- and Bi-Layer Graphene from Ethanol
CVD on metal substrates has been provn effective in the synthesis of graphene. But before application in graphene electronics, the quality of the synthesized graphene needs to be improved. Therefore a reliable method to grow large-scale, highquality graphene is required. Besides, the mechanism of graphene growth is not fully understood. Here we report utilizing CVD to produce monoand bi-layer g...
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We report the extended growth of Graphene Oxide (GO) flakes using atmospheric pressure ethanol Chemical Vapor Deposition (CVD). GO was used to catalyze the deposition of carbon on a substrate in the ethanol CVD with Ar and H2 as carrier gases. Raman, SEM, XPS and AFM characterized the growth to be a reduced GO (RGO) of <5 layers. This newly grown RGO possesses lower defect density with larger a...
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LPCVD is a process used in the manufacturing of the deposition of thin films on semiconductors usually ranging from a few nanometers to many micrometers. LPCVD is used to deposit a wide range of possible film compositions with good conformal step coverage. These films include a variety of materials including polysilicon for gate contacts, thick oxides used for isolation, doped oxides for global...
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Acknowledgements With the utmost gratitude I would like to thank my supervising professor, Shigeo Maruyama, for his persistent support, and enduring guidance during the past three years. His enthusiasm in education and research, along with his experience and knowledge has led me to become a full-fledged researcher. His inspiring encouragement and insightful advice brought me to success. I feel ...
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ژورنال
عنوان ژورنال: American Journal of Engineering and Applied Sciences
سال: 2016
ISSN: 1941-7020
DOI: 10.3844/ajeassp.2016.574.583